"ULTRA FLAT SILICON WAFER 6"",EA"

Ultra-Flat 6" Silicon Wafers

Ultra-Flat 6" diameter Silicon Wafer for demanding substrate studies. Can also be used as substrate for AFM or SEM samples by dicing the wafer into smaller pieces using a scriber and the Wafer Cleaving / Glass Breaking Pliers. The 6" ultra-flat silicon wafer is shipped in a 6" wafer carrier.

Properties for 6" (150mm) Ultra-Flat Wafer:

• Orientation: <100>
• Type/Dopant: P/Boron
• Grade: Prime / CZ Virgin
• Resistivity: 1-10 Ohm/cm
• Thickness: 675 +/- 25µm
• TTV: ≤ 1.5µm
• SFPD: <1.0 µm
• Warp: ≤30µm
• Bow: ≤ 30µm
• Particles: ≤ 30@≥0.2µm
• Front surface: Polished
• Back Surface: Etched
• Flat: 1 per SEMI Standard (flat length 57.5 ±2.5mm)
• Roughness: Typical 2-3 Å