SI3N4 DISKS, 3MM PK/10

Silicon Nitride Coated 3mm Discs (blanks)

These 3mm silicon discs have an ultra flat (RA of 0.45 ±0.02nm) 50nm ultra low stress silicon nitride layer (Si3N4) on both sides and can be used for a number of applications:

• Specimen mounts for SEM and FESEM applications
• Specimen discs for AFM applications which need a Si3N4 background
• Blanks to build the PELCO® Liquid Cell™ together with the PELCO® Silicon Nitride Membrane

Specifications:

• Film thickness: 50nm ultra low stress Si3N4 on both sides
• Disc thickness: 200µm silicon support
• Disc diameter: 3mm
• Surface roughness: The RMS (Rq) is 0.65 +/- 0.06nm which gives a mean roughness (Ra) of 0.45 +/- 0.02nm
• Packaging The PELCO® Silicon Nitride Discs are packaged under cleanroom conditions in a vial holding 10 discs